Filmetrics Profilm3D (MET-05) Standard Operating Procedure
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Degree type
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Subject
metrology
optical profilometer
3D imaging
nanotechnology
WLI
PSI
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
optical profilometer
3D imaging
nanotechnology
WLI
PSI
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
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Abstract
Standard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light Interferometer
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Publication date
2023-04-01