Silicon Nanowires: Doping Dependent N- And P- Channel FET Behavior
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The electrical transport properties of field effect transistor (FET) devices made of silicon nanowires (SiNWs) synthesized by pulsed laser vaporization (PLV) were studied. From as-grown PLV-SiNW FET, we found p-channel FET behavior with low conductance. To improve conductance, spin on glass (SOG) and vapor doping were used to dope phosphorus and indium into SiNW, respectively. From doping after synthesis, we could successfully make both n- and p-channel FET devices.
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2004-11-29
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Departmental Papers (MSE)
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2023-05-16T23:25:34.000
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Copyright Materials Research Society. Reprinted from MRS Proceedings Volume 832. 2004 Fall Meeting Symposium F Group-IV Semiconductor Nanostructures Publisher URL: http://www.mrs.org/s_mrs/sec_subscribe.asp?CID=2689&DID=114852&action=detail