How to Make Chips with Nanofabrication | University of Pennsylvania
Degree type
Discipline
Subject
Nanofabrication
Nanotechnology
Lithography
Etch
Deposition
Optical Microscopy
Reflectometry
Biochemical and Biomolecular Engineering
Bioimaging and Biomedical Optics
Biological Engineering
Biomaterials
Biomechanical Engineering
Biomedical
Biomedical Devices and Instrumentation
Biomedical Engineering and Bioengineering
Electrical and Electronics
Electromagnetics and Photonics
Electro-Mechanical Systems
Electronic Devices and Semiconductor Manufacturing
Energy Systems
Nanotechnology Fabrication
Other Biomedical Engineering and Bioengineering
Semiconductor and Optical Materials
Nanotechnology
Lithography
Etch
Deposition
Optical Microscopy
Reflectometry
Biochemical and Biomolecular Engineering
Bioimaging and Biomedical Optics
Biological Engineering
Biomaterials
Biomechanical Engineering
Biomedical
Biomedical Devices and Instrumentation
Biomedical Engineering and Bioengineering
Electrical and Electronics
Electromagnetics and Photonics
Electro-Mechanical Systems
Electronic Devices and Semiconductor Manufacturing
Energy Systems
Nanotechnology Fabrication
Other Biomedical Engineering and Bioengineering
Semiconductor and Optical Materials
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Abstract
The Singh Center for Nanotechnology and LRSM at the University of Pennsylvania demonstrate the nanofabrication process to make chips using lithography, deposition and etch. Fabricated chips were characterized with reflectometry and opticalmicroscopy. For more information: https://www.nano.upenn.edu/ https://www.nnci.net/
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Publication date
2020-11-10