Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators
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contour-mode resonator
channel-select filter
microelectromechanical systems (MEMS)
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This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (A1N) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 – 271 MHz), narrow bandwidth (~0.3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3 ~110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.
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Copyright 2007 IEEE. Reprinted from IEEE Ultrasonics Symposium, November 2007, pages 1158-1159. Publisher URL: http://dx.doi.org/10.1109/ULTSYM.2007.292 This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.