Progress Report III: Fabrication of Nanopores in Silicon Nitride Membranes using Electron-beam Lithography
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Nanopore
Electron-beam Lithography
Silicon Nitride
Engineering
Physical Sciences and Mathematics
Electron-beam Lithography
Silicon Nitride
Engineering
Physical Sciences and Mathematics
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Abstract
This report describes the fabrication of a long-range orderly nanopore structure in free-standing siliconnitride membranes using electron-beam lithography (EBL). The parameter setting and challenges of eachstep are discussed.
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2020-09-25