Paliwal, Swapil2023-05-232023-05-232015-04-272015-04-27https://repository.upenn.edu/handle/20.500.14332/45967http://creativecommons.org/licenses/by-sa/4.0/Explorer14 aluminum deposition rateAl (confocal) deposition rate 1 using Explorer14 magnetron sputtererReport