Wood, StevenLopez, Gerald G2023-05-232023-05-232016-04-272016-04-27https://repository.upenn.edu/handle/20.500.14332/45840The SOP for MicroChem SPR-220 7.0 at the Quattrone Nanofabrcation Facility is provided along with thickness vs. dose-to-clear and contrast curve data. The document is intended to provide a starting point when using MicroChem SPR-220 7.0.SPR220MicroChemSUSSMA6SPR-220Nanoscience and NanotechnologyReport