Barth, David S2023-05-232023-04-202023-04-012023-04-20https://repository.upenn.edu/handle/20.500.14332/45917Standard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light Interferometerhttp://creativecommons.org/licenses/by/3.0/metrologyoptical profilometer3D imagingnanotechnologyWLIPSIElectronic Devices and Semiconductor ManufacturingNanotechnology FabricationReport