Turakhia, Dhruv2023-05-232023-05-232015-05-012015-05-01https://repository.upenn.edu/handle/20.500.14332/45936http://creativecommons.org/licenses/by-sa/4.0/Deposition rateFeExplorer14Deposition Rates 2 on PVD75 DC/RF Magnetron SputtererReport