Deposition Rate, Surface Roughness, Morphology, and Film Stress of Al films prepared by Explorer14 Magnetron Sputterer

Nie, Zisong2023-05-232023-05-232015-04-272015-04-27https://repository.upenn.edu/handle/20.500.14332/45968http://creativecommons.org/licenses/by-sa/4.0/Deposition RateSurface RoughnessMorphologyFilm StressAlExplorer14Deposition Rate, Surface Roughness, Morphology, and Film Stress of Al films prepared by Explorer14 Magnetron SputtererReport