Johnston, Eric2023-05-232021-11-152021-11-152021-11-15https://repository.upenn.edu/handle/20.500.14332/45900The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.http://creativecommons.org/licenses/by-sa/4.0/ABM mask aligner lithographyOther