Azadi, MohsenLopez, Gerald G2023-05-232023-05-232016-07-182015-04-21https://repository.upenn.edu/handle/20.500.14332/45924Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.S1805S1813S1818S180518131818MicroChemspin curvesShipleyspin curveresistpositive resistresist thicknessspin speedElectrical and ElectronicsElectronic Devices and Semiconductor ManufacturingNanotechnology FabricationReport