Single-Ended-to-Differential and Differential-to-Differential Channel-Select Filters Based on Piezoelectric AlN Contour-Mode MEMS Resonators for Multi-Frequency Reconfigurable RF Transceivers

Zuo, Chengjie2023-05-222023-05-222010-04-012010-06-01https://repository.upenn.edu/handle/20.500.14332/33763Electrical and ElectronicsSingle-Ended-to-Differential and Differential-to-Differential Channel-Select Filters Based on Piezoelectric AlN Contour-Mode MEMS Resonators for Multi-Frequency Reconfigurable RF TransceiversArticle