Wood, StevenLOPEZ, GERALD G2023-05-232023-05-232016-02-042016-02-04https://repository.upenn.edu/handle/20.500.14332/45831Accurately gauge the optimal machine setting for MicroChem S1813 using the Heidelberg DWL 66+ and plot the contrast curves for the 2mm and 10mm writeheads.S1813Electronic Devices and Semiconductor ManufacturingNanotechnology FabricationReport