Gona, Ram SuryaJohnston, Eric D2023-05-232023-05-232017-10-202017-10-20https://repository.upenn.edu/handle/20.500.14332/45862To test the flaw propagation to features of SU-8 resist in the presence of 360nm long pass (LP) filter during exposure.http://creativecommons.org/licenses/by-sa/4.0/Report