Thickness and Permeability (against XeF2) of Parylene C film using Parylene Coater

Nie, Zisong2023-05-232023-05-232015-04-272015-04-27https://repository.upenn.edu/handle/20.500.14332/45931http://creativecommons.org/licenses/by-sa/4.0/ThicknessPermeabilityParylene CThickness and Permeability (against XeF2) of Parylene C film using Parylene CoaterReport