Auciello, OrlandoPacheco, SergioSumant, Anirudha VGudeman, ChrisSampath, SureshDatta, ArindomCarpick, Robert WAdiga, Vivekananda PZurcher, PeterMa, ZhenqiangYuan, Hao-ChihCarlisle, John AKabius, BerndHiller, JonSrinivasan, Sudarsan2023-05-222023-05-222007-12-012008-02-14https://repository.upenn.edu/handle/20.500.14332/39844Next-generation military and civilian communication systems will require technologies capable of handling data/ audio, and video simultaneously while supporting multiple RF systems operating in several different frequency bands from the MHz to the GHz range [1]. RF microelectromechanical/nanoelectromechanical (MEMS/NEMS) devices, such as resonators and switches, are attractive to industry as they offer a means by which performance can be greatly improved for wireless applications while at the same time potentially reducing overall size and weight as well as manufacturing costs.micromechanical devicesmicromechanical resonatorsmicroswitchestelecommunicationMEMS devicesNEMS devicesRF microelectromechanical devicesRF nanoelectromechanical devicesRF systemscivilian communication systemsdiamondsmilitary communication systemsresonatorsswitchesArticle