Thicknesses and Pinholes of SiO2, SiNx, and a-Si Films prepared by PECVD, No 2

Turakhia, Dhruv2023-05-232023-05-232015-04-282015-04-28https://repository.upenn.edu/handle/20.500.14332/45933http://creativecommons.org/licenses/by-sa/4.0/ThicknessesPinholesSiO2SiNxa-SiPECVDThicknesses and Pinholes of SiO2, SiNx, and a-Si Films prepared by PECVD, No 2Report