The Measurement of Residual Film Stress in Deposited Thin Films Using the KLA-Tencor 2D/3D P7 Surface Profilometer

Mays, Roman2023-05-232023-05-232017-02-072017-02-20https://repository.upenn.edu/handle/20.500.14332/45857Nanoscience and NanotechnologyThe Measurement of Residual Film Stress in Deposited Thin Films Using the KLA-Tencor 2D/3D P7 Surface ProfilometerReport