Film Stress of Ti film prepared by PVD75 e-beam evaporator

Nie, Zisong2023-05-232023-05-232015-04-272015-04-27https://repository.upenn.edu/handle/20.500.14332/45929http://creativecommons.org/licenses/by-sa/4.0/Film StressTi filmPVD75 e-beam evaporatorFilm Stress of Ti film prepared by PVD75 e-beam evaporatorReport