Paliwal, SwapilNie, Zisong2023-05-232023-05-232015-04-272015-04-27https://repository.upenn.edu/handle/20.500.14332/45927http://creativecommons.org/licenses/by-sa/4.0/Film stressTiExplorer14Film stress of Ti films prepared by Explorer14 Magnetron SputtererReport