Sinha, NipunGuo, ZhijunPiazza, GianlucaFelmetsger, Valery V.2023-05-222023-05-222010-06-062010-11-09https://repository.upenn.edu/handle/20.500.14332/39974This paper reports on the first demonstration of aluminum nitride (AIN) piezoelectric logic switches that were fabricated with ultra-thin (100nm) AIN films and exhibit a 1 mV threshold voltage via the body-biasing scheme. The application of a relatively low (< 6 V) fixed potential to the body terminal of a 4-terminal switch has been cycled to > 109 cycles and, although the contact resistance was found to be high (~ 1 MΩ), the nano-films have functioned throughout to show high piezoelectric nano-film reliability.EngineeringMechanical EngineeringPresentation