Azadi, MohsenRöhr, Jason Alexander2023-05-232022-10-252022-10-252022-10-25https://repository.upenn.edu/handle/20.500.14332/45914Standard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvaniasputteringphysical vapor depositionCondensed Matter PhysicsMaterials Science and EngineeringNanoscience and NanotechnologyReport