Zuo, ChengjieSinha, NipunPisani, Marcelo B.Perez, Carlos R.Piazza, GianlucaMahameed, Rashed2023-05-222023-05-222007-10-282008-02-02https://repository.upenn.edu/handle/20.500.14332/33517This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (A1N) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 – 271 MHz), narrow bandwidth (~0.3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3 ~110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.aluminum nitride (A1N)contour-mode resonatorchannel-select filtermicroelectromechanical systems (MEMS)Presentation