Cao, Yinong2023-05-232023-05-232016-05-122016-05-12https://repository.upenn.edu/handle/20.500.14332/45842http://creativecommons.org/licenses/by-sa/4.0/self-aligned double patternIndustrial TechnologyNanoscience and NanotechnologyOther Engineering Science and MaterialsOther Materials Science and EngineeringReport