Azadi, Mohsen2023-05-232021-10-152022-11-012021-10-15https://repository.upenn.edu/handle/20.500.14332/45919PECVDPECVD SOPOxford PlasmaLab 100 SOPCVD-01 SOPOxford PlasmaLab 100 PECVD standard operating procedureOther