Johnston, Eric D
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Publication Suss MicroTec MA6 Mask Aligner Training: First Mask(2019-09-09) Popoola, Ifeoluwa; Johnston, Eric DPublication IPG Green Laser Micromachining SOP(2023-02-11) Johnston, EricSOP for the 532nm green laser located in QNF.Publication Characterization and Optimization of Parylene-C deposition process using SCS Parylene coater(2019-01-15) Hastings, Hannah; Johnston, Eric D; Kim, GyuseokParylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating Systems. Results show a 12 µm thick Parylene-C film with 10 g of dimer and negligible thickness variation across a wafer. We find a positive linear relationship between film thickness and mass of dimer at a range of 1 g to 18 g. However, the Al boat for dimer was burnt with 18 g of dimer, suggesting multiple depositions with 1 g to 10 g of dimer are recommended to achieve the Parylene-C film thicker than 12 µm.Publication Mask Flaw Propagation Using 360nm Long Pass Filter(2017-10-20) Gona, Ram Surya; Johnston, Eric DTo test the flaw propagation to features of SU-8 resist in the presence of 360nm long pass (LP) filter during exposure.Publication YES Oven Tutorial: HMDS Vapor Prime(2019-11-11) Hall, Saarah; Johnston, Eric DPublication IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure(2021-12-22) Johnston, EricThe IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.Publication Effect of Post-Development Bake on Adhesion of SU-8(2017-07-14) Johnston, Eric D; Gona, Ram SuryaTo test adhesion of under-exposed SU-8 structures with the wafer surface by Post-Development (PD) Bake.Publication Training Video for Using Long-Pass Filter on Suss MicroTec MA6 Mask Aligner(2019-09-11) Popoola, Ifeoluwa; Johnston, Eric DPublication Presentation for Lab-on-a-Chip Seminar at QNF(2016-02-26) Johnston, Eric DPresentation for Lab-on-a-Chip seminar and workshop given on Friday June 15, 2017.Publication SU-8 Post Development Bake (Hard Bake) Study(2017-10-16) Gona, Ram Surya; Johnston, Eric DTest for annealing of SU-8 surface cracks by post-development bake at various temperatures and times.