Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications
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Acoustics, Dynamics, and Controls
Electrical and Electronics
Electro-Mechanical Systems
Electronic Devices and Semiconductor Manufacturing
Nanoscience and Nanotechnology
Nanotechnology Fabrication
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This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
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Suggested Citation: M. Rinaldi, C. Zuniga and G. Piazza, "Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications", Proceedings of the IEEE International Ultrasonics Symposium 2009, Rome, Italy, 20-23 September 2009, pp. 714-717.