Ultra-Thin Super High Frequency Two-Port ALN Contour-Mode Resonators and Filters
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MEMS Resonators
MEMS Filters
NEMS
Electrical and Electronics
Electronic Devices and Semiconductor Manufacturing
Nanoscience and Nanotechnology
Nanotechnology Fabrication
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This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) super high frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ 0.35%) and high off-band rejection (~ 35 dB) were achieved at an operating frequency of 1.96 GHz. This first prototype showed insertion loss of 11 dB, which can be improved to few dB if parasitic elements are eliminated or device capacitance is increased.
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Copyright 2009 IEEE. Reprinted from: Rinaldi, M.; Zuniga, C.; Zuo, C.; Piazza, G., "Ultra-thin Super High Frequency two-port ALN contour-mode resonators and filters," Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International , vol., no., pp.577-580, 21-25 June 2009 Publisher URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=5285390&isnumber=5285368 Digital Object Identifier: 10.1109/SENSOR.2009.5285390 This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.