GHz Range Nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator
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This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency read-out. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/µm2 and a fast response time (<1 >ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) as low as 1.5 ppb (4.7 ag/µm2) is experimentally verified.
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Suggested Citation: Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, and Gianluca Piazza. "GHz Range Nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator" 2010 Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2010) (2010): 471-474. "©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE."