PMMA A2 Contrast Curves
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PMMA A2
Contrast Curves
Nanoscience and Nanotechnology
Contrast Curves
Nanoscience and Nanotechnology
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This report documents the contrast curves for the PMMA A2 electron beam lithography resist from MicroChem. Spin curves for PMMA A2 can be found in previous work. The aim is to provide an approximate clearing and base dose for the PMMA A2 standard process at the Singh Center for Nanotechnology.
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2016-12-16