Azadi, Mohsen
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Publication Anatech SCE-108 Barrel Asher standard operating procedure(2022-08-01) Azadi, MohsenPublication Spin Curves for MicroChem S1800 (1805, 1813, 1818) Series Positive Resist(2016-07-18) Azadi, Mohsen; Lopez, Gerald GSpin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.Publication CSAR 62 Spin Curve(2018-12-21) Azadi, Mohsen; Griggs, Georgia; de Villafranca, Glen; Lopez, GeraldPublication Oxford PlasmaLab 80 Plus RIE standard operating procedure(2021-11-01) Azadi, MohsenPublication ALD deposition of SiO2 using BDEAS and Ozone precursors(2021-12-01) Azadi, MohsenIn this report, the ALD process for deposition of SiO2 using BDEAS and O3 as precursors has been studied. The etch rates and uniformity of deposition at various temperatures are reported.Publication Deposition and Etch Characterization of Low Stress Silicon Nitride Films Deposited via LPCVD(2022-08-01) Azadi, MohsenPublication PMMA A2 and A4 Spin Curves(2016-12-16) Lopez, Gerald G; Azadi, MohsenThis report documents the spin curves for the PMMA A2 and A4 electron beam lithography resists from MicroChem. The aim is to provide a spin curve reference for the A2 and A4 dilutions at the Singh Center for Nanotechnolgy Quattrone Nanofabrication Facility.Publication CSAR 62 Contrast Curves(2017-12-21) Azadi, Mohsen; Griggs, Georgia; de Villafranca, Glen; Lopez, GeraldPublication Cambridge Nanotech S200 ALD standard operating procedure(2021-10-01) Azadi, MohsenPublication PlasmaPro 100 Cobra ICP standard operating procedure(2022-01-01) Azadi, Mohsen