Spin Curves for MicroChem S1800 (1805, 1813, 1818) Series Positive Resist
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Degree type
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Subject
S1805
S1813
S1818
S1805
1813
1818
MicroChem
spin curves
Shipley
spin curve
resist
positive resist
resist thickness
spin speed
Electrical and Electronics
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
S1813
S1818
S1805
1813
1818
MicroChem
spin curves
Shipley
spin curve
resist
positive resist
resist thickness
spin speed
Electrical and Electronics
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
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Abstract
Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.
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Publication date
2016-07-18